Many problems in manufacturing systems can be formulated via Markov stochastic modeling. This paper gives a review and classification of timed models of manufacturing systems with particular emphasis on Markov models. As the associated Markov chains of even small systems are characterized by the well-known state explosion or largeness problem, the review continues on with the models and methods for the numerical solutions of large Markov chains. In addition, the software tools are summarized. Finally, the paper provides some challenges and directions for further research on the modeling of manufacturing systems.